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1·The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator.

上述检测电路检测上述静电型致动器的上述绝缘膜中所积蓄的上述电荷量。

2·A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit.

半导体集成电路具有静电型致动器、检测电路、存储电路及偏置电路。

3·The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.

上述偏置电路根据上述存储电路存储的上述检测结果，使用于驱动上述静电型致动器的驱动电压变化。

4·The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode.

上述静电型致动器具有上部电极、下部电极及在上述上部电极和上述下部电极间配置的上述绝缘膜。

5·The calculation of electrostatic distribution has been carry out for the plasma actuator, which provide numerical value simulation for the design of actuator.

进行了等离子体反应器的静电场分布计算，为等离子体反应器的设计提供了数值模拟。

6·A novel micromachining torsion beam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM).

报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。

7·The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.

介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。

8·Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature.

静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。