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1·The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR.

采用了光刻、电镀、溅射等微细加工工艺制造了MGELR的定子。

2·They include laser doping, laser annealing, laser depositing film, solid-phase reaction induced by laser and laser photolithograph.

这些应用大致涵盖激光掺杂、激光退火、激光沉积薄膜、激光引发固相反应和激光光刻等几方面。