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1·The progress of MEMS was introduced and prospected.

介绍了微机电系统当前的进展与发展前景。

2·The optimization of the MEMS fabrication process is analyzed.

分析了MEMS制作工艺的改进。

3·LIGA technology play a very important role in the fabrication of MEMS.

LIGA技术在微机械结构的制作中具有很重要的作用。

4·The characteristic size of MEMS components is from micron to millimeter.

MEMS器件的特征尺寸范围为几微米到几毫米。

5·The kernel problem in virtual MEMS fabrication process is process model.

MEMS加工工艺的核心是工艺模型。

6·This method may be further extended to the analysis of other MEMS devices.

这种方法也可以推广应用到其它MEMS器件的优化问题。

7·This paper reviews the techniques and applications of diamond MEMS devices.

本文主要综述了金刚石MEMS器件的技术和应用。

8·The output of MEMS accelerometer is influenced by the environment temperature.

微机械加速度计的输出受到环境温度的影响。

9·The basic concept of optical switch, MEMS and MEMS optical switch were introduced.

介绍了光开关、MEMS和MEMS光开关的基本概念。

10·Expansibility is a very important performance for the design of MEMS optical switch array.

在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。