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1·Model of growth, surface morphology, microstructure and of the Uraniun films by magnetron sputter deposition have been investigated by scanning transmission electron microscopy(STEM).

采用扫描透射电镜（STEM） ，研究了铝上磁控溅射沉积铀薄膜的形貌、组织、结构以及铀薄膜的生长模型。

2·It can be used for single ion implantation, ion beam mixing, single ion or reactive ion beam sputter-deposition and ion beam enhanced deposition.

可用于单离子注入，离子束混合，单离子或反应离子束溅射淀积以及离子束增强淀积。

3·This article introduces processing of plasma chemistry and application of sputter coating and plasma-enhanced chemical vapor deposition in powder metallurgy especially.

介绍了等离子体化学工艺，特别着重介绍了溅射镀膜与等离子体化学气相沉积在粉末冶金中的应用。