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1·A flexible substrates is mounted on the cylindrical susceptor.

挠性衬底安装在圆柱形衬托器上。

2·The susceptor rested on a pedestal whose shaft is connected to a motor that provides rotation.

器 安装在轴承台上，它的支架与提供旋转的马达相接。

3·In the other embodiment, the susceptor cross section is a polygon with a plurality of substrates mounted on its facets.

在另一个实施方式中，衬托器截面是多边形，且多个衬底安装在衬托器的面上。

4·Using finite analytic solution we gave the numerical computation of the flow field in CVD reactor with tilted susceptor.

本文用有限分析方法，对带有倾斜基座的CVD反应器内流场进行了数值计算。

5·In one embodiment, the process reactor has four composite injectors arranged substantially parallel to the axis of rotation of the cylindrical susceptor.

在一个实施方式中，处理反应器具有基本上平行于圆柱形衬托器的旋转轴设置的四个复合注入器。

基座

1·Using finite analytic solution we gave the numerical computation of the flow field in CVD reactor with tilted susceptor.

本文用有限分析方法，对带有倾斜基座的CVD反应器内流场进行了数值计算。